Abstract
In the past decades, ferroelectric materials have attracted wide attention due to their applications in nonvolatile memory devices (NVMDs) rendered by the electrically switchable spontaneous polarizations. Furthermore, the combination of ferroelectric and nanomaterials opens a new route to fabricating a nanoscale memory device with ultrahigh memory integration, which greatly eases the ever increasing scaling and economic challenges encountered in the traditional semiconductor industry. In this review, we summarize the recent development of the nonvolatile ferroelectric field effect transistor (FeFET) memory devices based on nanostructures. The operating principles of FeFET are introduced first, followed by the discussion of the real FeFET memory nanodevices based on oxide nanowires, nanoparticles, semiconductor nanotetrapods, carbon nanotubes, and graphene. Finally, we present the opportunities and challenges in nanomemory devices and our views on the future prospects of NVMDs.
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Introduction
According to Moore's law, the number of transistors accommodated on the integrated circuits doubles roughly every 18 months and so does the performance [1]. As the essential part of the integrated circuits, nonvolatile memory devices (NVMDs) have been heavily deployed in portable electronic devices to realize secure and fast data transfer, such as the ID cards, MP3 player, and so on. The versatile NVMDs should be reprogrammable and require a mechanism of repeatable switching between different binary states [2–4]. The ferroelectric field effect transistor (FeFET) is one of such promising NVMDs with the lowest power consumption [5] and high speed bearing comparable to that of dynamic random access memory [6]. Other memory mechanisms including polarization induced by the polar molecule (such as H2O) adsorption/desorption and by the defect-related charge-trapping layer have also been studied [7–9]. However, both the adsorption/desorption and the defect-related charge-trapping mechanisms suffer from reproducibility problems caused by the nature that neither the adsorption/desorption of polar molecules nor the amount or distribution of the defects can be exactly controlled, which creates a great challenge for reproduction. This review therefore gives an overview of the advances of FeFET for NVMDs in the current state and the future.
The simple architectural structures and mature fabrication technologies of the traditional thin-film transistor have sparked a surge of interest in the thin-film FeFET for NVMDs. However, theoretical calculation has shown that the planar corrugations effectively worsen the distribution of polarization bound charges [10], due to smearing of the phase transition. It's well recognized that the physical properties of ferroelectric thin film are significantly limited by a critical size [11–13]. Furthermore, with the decrease in the thickness of the ferroelectric thin film, the remnant polarization (Pr) decreases and the coercive field (Ec) turns up increasingly due to the collapsed dielectric response [14–18]. This imposes a serious limitation on the desired integrated density and leads to poor performance in the thin-film transistor-based NVMDs [19]. In order to fulfill the particularly required performance such as retention time, endurance, response time, and/or power consumption, plenty of nanomaterials and alternative technologies have been utilized to enhance the integrated density and performance, which open a route to overcome the scaling limitations and economic challenges encountered in the current silicon industry [20–24]. In this survey, we summarize the current researches on fabricating a promising nano-FeFET. This paper is organized as follows: the ‘Ferroelectric and the operating principle of FeFET’ section summarizes the structure and characters of ferroelectric and the operating principle of FeFET. The ‘Current researches’ section reviews the current state of nano-FeFET devices, including the combinations of ferroelectrics with nanowires (NWs) [17, 25–28], nanoparticles (NPs) [29–32], three-dimensional (3D) nanostructures [33–35], carbon nanotubes (CNTs) [36–45], and graphene [43, 46–49]. The ‘Challenges and improvements’ section explains the fatigue mechanism and provides an overview of the efforts that have been taken to improve the fatigue resistance. The ‘Conclusions’ section gives an outlook and conclusion for the practical applications of FeFET.
Ferroelectric and the operating principle of FeFET
The uniform characters of ferroelectrics offer opportunities for fabricating NVMDs. Devices based on one-dimensional (1D) [17, 25, 37–39] or two-dimensional (2D) [43, 46] nanostructures have been realized with excellent performance [50, 51]. This section is divided into two parts: Ferroelectric is introduced first followed by the descriptions of the structure and principle of polarization. The operating and programming principles of FeFET for memory are then presented.
Ferroelectric
In general, ferroelectrics are dielectric crystals with the perovskite structure, [22] whose formula is ABO3 with the schematic structure shown in Figure 1a. The spontaneous polarization arises as the temperature sweeps due to a lattice distortion which involves the relative displacements of B4+ in each cell. These ferroelectric behaviors appear only under an inherent temperature (Curie temperature TC). As shown in Figure 1b, the similar polarization phenomenon can also be exhibited from the ferroelectric under the condition of an external electric field (E), in which the intensity of polarization (P) does not exhibit a linear response to E but instead shows a closed hysteretic loop. When E strides a particular value, the polarization is reversed, and we call this value coercive field Ec (see Figure 1b). In other words, P can be switched by modulating E, and the remnant polarization + Pr and − Pr states are stored in ferroelectric. The bistable state of ferroelectric can be programmed as binary information ‘1’ and ‘0’ for NVMDs. Considerable efforts therefore have been taken to exploit available NVMD devices based on this.
FeFET
A reasonable model is critical in order to take the advantages of ferroelectric for fabricating the NVMDs [52]. The typical memory devices are built on the base of the capacitor [5, 53, 54] or FeFET [55, 56]. The former model consists of a thin ferroelectric film between two conductive electrodes, and the latter one is similar to a metal-oxide-semiconductor field-effect transistor (MOSFET). Figure 2 shows the schematic diagrams of both. Shiga et al. have demonstrated that the signal significantly deteriorates as the capacitor size scales down, which limits the memory capacity to 128 Mb. [57]. The leakage current is another key challenge for the development of capacitor-based NVMDs [58]. On the other hand, FeFET has a well-defined memory switch behavior with simple nondestructive readout (NDRO) process carried out by detecting IDS or the resistance of the active channel. Due to the excellent performance obtained, the integration of ferroelectrics with nanomaterials has been extensively explored in previous works [2, 43, 59–61], where ultimate scalability has been reported as well. Thus, in this paper, we give the special attention to FeFET-based memory devices with nanostructures.
Unlike MOSFET, the oxide-gate dielectric is replaced by ferroelectric in FeFET. By modulating the gate bias, the carriers accumulate or deplete at the ferroelectric (FE)-semiconductor interface, leading the FeFET on or off, as shown in Figure 3a,b (a p-channel FeFET) [62]. The corresponding transfer curve of IDS versus VG has been depicted in Figure 3c. With the polarization of the FE layer, the curve of IDS varies with VG as a hysteretic loop when VG sweeps upward (from negative to positive) and then downward (from positive to negative) continuously. Moreover, even if VG is released, the charges remain; thus, the device retains its state. Therefore, as VG = 0 V, the device still exhibits an on or off state, which can be defined as 1 and 0. In other words, the information in FeFET is not lost even when encountering a power outage. The information can be read out by detecting the IDS or the resistance of the active channel. Figure 3c is the corresponding closed hysteretic loop of IDS versus VG, which shows the track of switching between the 0 and 1 state. It's evident that the appropriate large value of Pr and low EC are important for the performance of FeFET [59, 63]. A too low Pr may not be able to induce enough accumulated carriers at the FE-semiconductor interface to give rise to an evident change of conductance of the channel. On the other hand, although a low EC can realize a low operating bias, it also raises a serious accompanying instability problem since a low voltage is not enough to switch the states of the device, which can be solved by the concessive method using a thick FE layer. In general, the properties of ferroelectric are essential for the fabrication of FeFET.
Current researches
With the development of the fundamental material science, tremendous progress has been made to fabricate FeFET for NVMDs based on coetaneous advanced materials. In this section, we discuss the current research on FeFET for NVMDs.
Oxide NW-based FeFET
Based on the traditional thin-film FET, it is easy to fabricate a thin-film FeFET. Although its simple structure can supply easy fabrication [64], it also suffers from several problems which need to be solved [65, 66]. For example, the EC of the film is typically several kilovolts per centimeter, which requires a high operating voltage to reverse the polarization. Moreover, the poor polarization value can hardly effect an evident conductance change [67]. On top of these, the low field-effect mobility, low on/off ratio, low subthreshold slope, and the poor switch speed are limitations impacting the applications of the thin-film FeFET [68–70]. In recent years, oxide NWs have emerged as promising building blocks in various technological domains including fundamental researches and nanodevice applications due to their unique structures and stable properties [71, 72]. Tremendous efforts have been made to fabricate NW FeFETs, which use the NWs as the active channel. In the early days, In2O3 NWs have been integrated with lead zirconate titanate (PZT) to fabricate FeFET. Due to the high dielectric constant and the switchable spontaneous polarization of PZT, the fabricated device received an enhanced performance and memory effect [25], when compared with the traditional SiO2-gate FET. The schematic diagram is shown in Figure 4a, which reveals that the back-gate FeFET structure has been used in this research. The In2O3 NWs with a diameter of 10 nm were first ultrasonicated in isopropanol and then deposited onto the PZT/Pt/SiO2/Si substrate by spin-coating technique. Photolithography, Ti/Au deposition, and lift off were carried out subsequently to pattern the source and drain electrodes, which were in contact with an individual NW. The fabricated FeFET operated on an accumulation/depletion mode with the conduction of the active NW channel modulated by the gate potential. Figure 4b shows the transfer curves of the memory device, exhibiting a closed counterclockwise loop, when VG was sweeping upward and then downward. As VG = 0 V, there were two pronouncedly different values of IDS, which were caused by the switchable Pr of the PZT layer. Hence, we could define the larger one as a binary 1 and the smaller one as 0 to realize the basic program function. Moreover, the methods used in this experiment could be generalized and applied to other NW systems to obtain nanoscale memory devices.
Having inherent defects in ZnO NWs, such as oxygen vacancies and Zn interstitials, ZnO NWs present the character of the natural n-type semiconductor [73]. In Liao's recent work [2], ZnO NW was combined with PZT thin film to realize the memory function successfully. The schematic diagram and scanning electron microscopy (SEM) image were shown in Figure 5a,b, respectively. As ZnO NW is an n-type semiconductor, with the polarization of PZT, a positive pulse gate voltage would raise up the band of the channel and then deplete the electrons in the NW, as shown in Figure 5c. The device presented an effectively ‘off’ state, which could be defined as a binary 0. The binary 1 representing the opposite state could be defined as well in Figure 5d. Based on this principle, the state of the device could be switched by a timely pulse; in other words, the programming process was realized. The transfer character also demonstrated the switching mechanism with two pronounced states at VG = 0 V, which is shown in Figure 6a. Reading cycles of 103 of both 1 and 0 states were carried out in Figure 6b. As we can see, the two states were still well distinguishable, showing a sustaining memory performance.
Despite the achievements made with the NWs, which yield many attractive features and desirable capability for potential applications, there are still many more new approaches coming up to further improve the integrated density. The multi-bit FeFET has been considered to supply higher density for storage, which could overcome the scaling limitations and economic challenges in the current silicon industry. The ZnO NW FET (Figure 7a) with coated ferroelectric BaTiO3 (BTO) NPs has realized the function for a two-bit memory [17]. Figure 7b,c showed the schematic view of the differing degrees of reoriented electric dipole moments when a positive and negative bias was applied, respectively. The polarization of the NPs gave rise to a higher positive gate bias and then induced more polarized NPs. The more polarized charges were accumulated at the NP-NW interface, the larger the conductance of the active channel was. The surface engineering further caused a positive shift of the threshold voltage (Vth). In Figure 8a, it's obvious to find that Vth was dependent on the sweep range of the gate voltage as well as the sweep direction. A more negative initial sweep voltage caused a more positive shift of Vth. Similarly, a more negative threshold voltage shift was related to a more positive initial sweep voltage. In addition, as mentioned previously, the information could be read out by detecting the current or the active channel resistance, so an individual device used herein could store multi-bit information with different gate voltage pulses. The different states of the IDS were corresponding to different binary information, which could be modulated by varying gate voltage pulses. Figure 8b showed the detailed practical process of programming ‘00’, ‘01’, ‘10’, and ‘11’ states. With the ability of storing multi-bit information in an individual memory device, the device reported herein provided a new way to enhance the integrated density.
Furthermore, the synthesis methods applied here demonstrated a simple room-temperature process for integrating the FE NPs with ZnO NW to fabricate the multi-bit memory device. The device fabricated in this way had a remarkably high on/off ratio of 104 and a long retention time over 4 × 104 s, which made it easy to recognize the two binary states. This work thus provided a viable route to fabricate high density NVMDs to overcome the existing physical and technological limitations.
Nanotetrapod-based FeFET
In order to exploit the bottom-up technology, extensive studies on 3D structure-based devices have flourished, inspired by the peculiar prosperity of the architectures. Depending on the kinetics of the growth process, two crystal structures of one same compound can exist stably. Despite the changes in size, the additional structure provides more electronic states and characters. These special features provide the precious opportunity for making efficient nanodevices. CdS nanotetrapods provide a typical example in which each individual nanotetrapod is combined with the pyramidal-shaped zincblende structure core and wurtzite arms, with the electrons and holes located in each other, respectively. Moreover, the bandgap of the arms is larger than the one of the core. With the type II band alignment, a peculiar electron transport is observed.
Due to the unique and also discommodious 3D structure, CdS nanotetrapods were impossible to lie flat on the gate, resulting in poor capacitance coupling, whereas the ferroelectric with high dielectric constant can make up it; therefore, the memory effect was also observed [35]. Figure 9a shows the schematic diagram, Figure 9b,c shows the transmission electron microscopy (TEM) images of CdS nanotetrapods, and Figure 9d,e shows the SEM images of the device. To investigate the performance of the prepared device, the transfer character of the device was measured with the gate voltage swept upward and then downward continually under various temperatures (see Table 1). It is obvious that a counterclockwise hysteretic loop is presented at 300 K, whereas a clockwise hysteretic loop is presented at 80 K. The phenomenon in Figure 1a could be attributed to the ‘charge-store’ memory effect [74]. The defects in the FE layer and the FE-CdS interface provided the low potential site for storing charges which affects the distribution of the charges in the active channel, just like floating gates. On the other hand, the typical ferroelectric memory clockwise loop in Figure 10b indicated that the ferroelectric memory played the dominant role at low temperature. The charge-store memory effect competed with ferroelectric memory as the temperature varied. This was demonstrated by the curve at 140K where no evident hysteretic loop was present (Figure 10c). At low temperature, few trapped charges were active, and the charge-store effect became frozen [75]; therefore, the ferroelectric memory effect became dominant, which was proved by the ferroelectric character at 8.5K (Figure 10d). The positive voltage led to − Pr in the FE layer and an upward band of core, resulting in a higher potential barrier on the core/shell interface which gave rise to a lower conductance and a positive shift of the electric spectra, as shown in Figure 10d. The binary 1 and 0 can then be defined at 8.5 K, respectively.
CNT-based FeFET
The performance of the oxide NW-based FeFET is predetermined by the material properties, such as the intrinsic defects and poor field-effect mobility. As a flexible and high carrier mobility material with no dangling bond, the carriers in the carbon nanotube (CNT) can realize 1D near-ballistic transport at room temperature [76, 77], which is the inherent property that is absent in the traditional oxide NWs [36]. Due to the decrease of the density of states over the increasing energy, the same amount of carriers can induce a more intensified shift of Fermi level than in traditional oxide NWs [37]. CNT therefore has attracted more and more attention with new researches focusing on fabricating CNT-based FET in the past decades [78, 79]. With the narrow bandgap of 0.5 eV, the depolarization field is suppressed in CNT, which supplies a much more stable remnant polarization than the traditional oxide NWs. Thus, the enhancement of performance can be obtained from the CNT-based FeFET memory device. However, there still exist many intrinsic flaws in the fabrication of FeFETs. For example, the defects on the interface between the FE layer and single-wall carbon nanotube (SWCNT) can trap charges and hence lead to deterioration of polarization. In addition, the temperature-dependent charge-store memory effect is not controllable as the amount and the distribution of the defects are uncontrollable [80]. Hence, controlling the ‘floating gates’ distributed along the SWCNT channel has been proved difficult.
Based on an excellent FE-CNT interface with few defects in the FE layer, an intrinsic ferroelectric memory FeFET was fabricated by integrating BTO with SWCNT [38]. The moderate preparation process has been carried out to reduce the interface reaction: BTO was pre-prepared on a smooth Nb-doped (001) SrTiO3 (STON) substrate by pulsed laser deposition (PLD). Then, the temperate method of spin coating was utilized to deposit SWCNTs onto BTO. Figure 11a showed the schematic diagram of the memory device. The TEM image of the microstructure of the memory device was also displayed in Figure 11b, which revealed a coherent epitaxial growth of BTO on STON. The typical clockwise hysteresis loop was shown in Figure 11c. As we mentioned previously, the Vth shift was in accordance with the variation of the sweeping region and the initial value. The Vth values of the device herein were 2.5 V and −1.5 V as VG swept upward and downward, respectively, which supplied a wide memory window of 4 V. Thus, when a positive pulse was applied on the active SWCNT channel (assuming a positive voltage of drain-source), the polarization of BTO went from the FE layer towards the SWCNT. When the pulse was released, a high barrier was induced by the downward band bending of SWCNT. Hence, the device was effectively at off state, which could be defined as binary 0. The binary 1 could be defined correspondingly as well. A series of homologous pulses tracking the hysteresis loop could therefore realize a sequence of erases and writes. It should be noted that a compromised hysteresis loop has been observed when the gate voltage was below 1 V, as shown in Figure 12a, whereas the coercive voltage of the FE layer herein was about 2 V. To further investigate this interesting behavior, a theoretical simulation was performed. As shown in Figure 12b,c, the electric field at the interface between the SWCNT and FE layer was far more than EC caused by the ultrathin SWCNT; thus, the device could still remain valid at the gate voltage of less than 1 V. Therefore, CNT FeFET offers great potential for manufacturing low-power consumption NVMDs. For a coherent study of this work, a double-gate SWCNT FeFET (a two-bit memory device) was fabricated with the similar technology roadmaps. The schematic maps of the fabrication are shown in Figure 13a,b,c [38]. As a p-type intrinsic SWCNT FeFET memory device, with VDS = 10 mV, the device was turned off when a positive gate pulse (2 V) was applied on both gates, which corresponded to the program process of erasing the information stored to binary state 00. The binary information of 01 could be written into an individual FeFET by applying a low bias of −0.5 V on gate 2, which was lower than the threshold voltage yet not enough to induce an efficient polarization in the FE layer. As a result, gate 1 became off (binary 0 state) and gate 2 became on (binary 1 state). The whole program process is shown in Figure 13e, which exhibits a high mobility of approximately 103 cm2 V−1 s−1 and an ultrahigh integration density of over 200 Gbit/in.2. This is highly desirable for the practical applications.
Graphene-based FeFET
Unlike the traditional semiconductor, graphene does not have bandgap. Therefore, the graphene-based FET usually has poor on/off ratio at room temperature [81, 82]. Although it has no advantages for digital switches, its high carrier mobility and excellent transconductance make it an ideal material for the radio frequency analog electronics in the logic integrated circuit [83–86]. The high carrier mobility also makes it a promising candidate for the next-generation ultrafast NVMDs [47, 87]. Moreover, the enhanced interfacial coupling makes the performance of the graphene-based memory device much more elevated [43, 46].
The graphene-based FeFET was fabricated using graphene as active channel (Figure 14a) [43]. A 700-nm-thick FE layer of poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) was then spin-coated on the graphene as the top gate. The atomic force microscopy (AFM) image (Figure 14b) showed that the FE layer has formed a continuous thin film. With the switchable polarization of PVDF-TrFE, a resistance hysteretic loop with double peaks was obtained in Figure 15a, due to the induced doping in graphene caused by the flipping electric dipoles. The binary states of 0 and 1 could then be defined as the minimum and the maximum values of R, respectively. With the closed hysteretic loop, the program processes could be realized by sweeping VG in the specific direction. Regardless of how the binary state transits, the program processes could be realized by following a full loop, as shown in Figure 15c,d,e,f. The graphene-based FeFET featured a high carrier mobility of 200,000 cm2 V−1 s−1 and a reading speed as fast as 10 fs. It should be further noted that the pronounced ΔR/R exceeded 200 %, which was essential for the retention time and fatigue resistance. These unique characteristics of graphene-based FeFET offer excellent potential in the applications of ultrafast FeFET-based NVMDs.
Challenges and improvements
In the previous sections, we have introduced several excellent researches and their potential applications in the domain of NVMDs. However, several inherent flaws have hindered its practical deployment, such as the endurance, fatigue, and retention time [88–91]. Theoretically, the characteristics of ferroelectric would not change. Nevertheless, the visualized experimental transformation of the hysteretic loop of the FE layer revealed that after a number of repetitive bipolar switching cycles, Pr decreased and EC increased [92] (Figure 16). As a result, the smaller Pr may not be able to induce enough carriers in the active channel and would lead to difficulty in distinguishing the binary signal 0 and 1, which consequently stops the memory device. Moreover, a larger EC means that a higher bias is required to switch the device. More researches therefore have been done to overcome these problems, including the introduction of new technologies and new materials to get enhanced performance.
Oxide conductor as electrodes
According to the model proposed by Dawber [93] and Scott [94], oxygen vacancies in ferroelectric films are believed to be able to impact the fatigue. Due to the local phase decomposition of ferroelectric and the oxygen vacancy migration towards the FE-electrode interface, accumulating and forming a pin structure, the remnant polarization is dramatically decreased [95]. In the typical example of PZT, the oxide conductive materials were utilized as the electrodes [96], which effectively blocked the diffusion effect in each interface. The crystalline structures therefore were not corroded, showing no fatigue behavior. The size effect was associated to the fatigue behavior as well. Table 1 shows a few ferroelectric systems and the characteristics of size effect in relation to fatigue behavior [97].
Insert buffer
After a number of switch cycles, the carriers in the semiconductor may inject into the FE layer, which deteriorated the dielectric constant of the FE layer. Moreover, the reduction of remnant polarization was observed after modulating the VG, as proved by extensive experiments [98–100]. Therefore, a high κ buffer was introduced between the FE layer and semiconductor. On one hand, the buffer acted as the diffusion barrier to prevent the ferroelectric from being deteriorated [101]. On the other hand, though the superposed layers were equivalent to two serial capacitors, it made the voltage at the FE layer only slightly smaller than the initial gate voltage [53]. The representative work has been carried out in the early days, which inserted a 13-nm-thick buffer insulation layer of (HfO2)0.75(Al2O3)0.25 between p-type Si and a 400-nm-thick FE layer of SBT [14]. Figure 17a shows the schematic structure of the device. As shown in Figure 17b,c, it retained an on/off ratio of more than 106 even after 12 days and endured 1012 cycles with no changes. Due to the superior retention and endurance, considerable researches have been done to exploit this for practical applications.
Reduction of interfacial states
The scientific experiments have demonstrated that the interface quality of the device is essential for the fatigue behavior [102, 103]. The reduced interaction is beneficial for the fatigue resistance, which was demonstrated by the researches executing a post annealing to obtain enhanced performance [19]. Many new technologies and new materials were also introduced to enhance the fatigue resistance, such as the position controllable dip-pen nanolithography (DPN) technology [104]. In this work, PVDF-TrFE was used as the ferroelectric gate. Unlike the inorganic ferroelectric, organic ferroelectric (PVDF-TrFE) has temperate chemical affinity and lower interfacial tension towards the CNT channel, which led to fewer defects in the interface. Figure 18a,b shows the visualized schematic technology maps of the fabricating process, and Figure 18c was the AFM image of the CNT-based nonvolatile memory device. The introduction of nanodot ferroelectric gate (approximately 9.2 nm) realized a high integration density of the memory device, with the bistable state remarkably well retained at up to 106 s. Moreover, as shown in Figure 18d,e, even after approximately 1010 switching cycles, the two states were still distinguishable, demonstrating great performance.
Conclusions
In this paper, we explain the operating principles of FeFET and review several excellent researches on the integration of semiconductor materials with ferroelectric to achieve agreeable memory performance. The advantages of the nonvolatility and NDRO process make FeFET ideal for memory applications. With the development of material fabrication technologies, the non-planar ferroelectric nanostructures such as FE NWs [105–107], nanotube [108–110], and NPs [108] have been prepared successfully. Although the capacity of the first FeRAM had only a 256-bit density [111], with the incorporation of the modern semiconductor technology, ferroelectric nanostructures with much higher integration density have been integrated in a large scale [112, 113]. The integration density can be further enhanced with new technologies and/or new device structures. Based on the current achievements on the controllable and selective growth of CNT arrays, as shown in Figure 19a, we suggest a new FeFET architecture by integrating CNT arrays with ferroelectric to further enhance the integration density of the memory devices. While current FeFET advancements have supplied potential routes to overcome the scale limitations and economic challenges, the fatigue and retention time remain as the main challenges hindering the practical applications. It still will be a long way to go to realize the mass commercial production.
References
Lundstrom M: law forever? Science 2003, 299: 210. 10.1126/science.1079567
Liao L, Fan H, Yan B, Zhang Z, Chen L, Li B, Xing G, Shen Z, Wu T, Sun X: Ferroelectric transistors with nanowire channel: toward nonvolatile memory applications. ACS Nano 2009, 3: 700–706. 10.1021/nn800808s
Tue PT, Miyasako T, Trinh BNQ, Li J, Tokumitsu E, Shimoda T: Optimization of Pt and PZT films for ferroelectric-gate thin film transistors. Ferroelectrics 2010, 405: 281–291. 10.1080/00150193.2010.483398
Heremans P, Gelinck GH, Muller R, Baeg KJ, Kim DY, Noh YY: Polymer and organic nonvolatile memory devices. Chem. Mater 2011, 23: 341–358. 10.1021/cm102006v
Xie D, Ren TL, Liu LT: M/Bi3.4La0.6Ti3O12/I/Si capacitors for the application in FEDRAM. In Proceedings of 2007 International Workshop on Electron Devices and Semiconductor Technology: June 3–4 2007; Beijing. IEEE, Washington D.C; 2007:74–77.
Arimoto Y, Ishiwara H: Current status of ferroelectric random-access memory. MRS Bull 2004, 29: 823–828. 10.1557/mrs2004.235
Wang H, Wu Y, Cong C, Shang J, Yu T: Hysteresis of electronic transport in graphene transistors. ACS nano 2010, 4: 7221–7228. 10.1021/nn101950n
Ling QD, Lim SL, Song Y, Zhu CX, Chan DSH, Kang ET, Neoh KG: Nonvolatile polymer memory device based on bistable electrical switching in a thin film of poly (n-vinylcarbazole) with covalently bonded C60. Langmuir 2007, 23: 312–319. 10.1021/la061504z
Mukherjee B, Mukherjee M: Nonvolatile memory device based on Ag nanoparticle: characteristics improvement. Appl Phys Lett 2009, 94: 173510. 10.1063/1.3127233
Gerra G, Tagantsev AK, Setter N: Ferroelectricity in asymmetric metal-ferroelectric-metal heterostructures: a combined first-principles phenomenological approach. Phys Rev Lett 2007, 98: 207601.
Kornev IA, Fu H, Bellaiche L: Properties of ferroelectric ultrathin films from first principles. J Mater Sci 2006, 41: 137–145. 10.1007/s10853-005-5962-0
Gruverman A, Kholkin A: Nanoscale ferroelectrics: processing, characterization and future trends. Rep Prog Phys 2006, 69: 2443. 10.1088/0034-4885/69/8/R04
Shaw T, Trolier-McKinstry S, McIntyre P: The properties of ferroelectric films at small dimensions. Annu Rev Mater Sci 2000, 30: 263–298. 10.1146/annurev.matsci.30.1.263
Sakai S, Ilangovan R: Metal-ferroelectric-insulator-semiconductor memory FET with long retention and high endurance. IEEE Electron Device Lett. 2004, 25: 369–371. 10.1109/LED.2004.828992
Tue PT, Bui NQT, Miyasako T, Tokumitsu E, Shimoda T: Fabrication and characterization of a ferroelectric-gate FET With a ITO/PZT/SRO/Pt stacked structure. In International Conference on Microelectronics: December 19–22 2010. IEEE, Cairo. New York; 2010:32–35.
Hutchby JA, Bourianoff GI, Zhirnov VV, Brewer JE: Extending the road beyond CMOS. IEEE Circuits Devices Mag. 2002, 18: 28–41.
Sohn JI, Choi SS, Morris SM, Bendall JS, Coles HJ, Hong WK, Jo G, Lee T, Welland ME: Novel nonvolatile memory with multibit storage based on a ZnO nanowire transistor. Nano Lett. 2010, 10: 4316–4320. 10.1021/nl1013713
Jimenez D, Miranda E, Godoy A: Analytic model for the surface potential and drain current in negative capacitance field-effect transistors. IEEE Trans. Electron Devices 2010, 57: 2405–2409.
Yoon SM, Yang SH, Jung SW, Byun CW, Park SHK, Hwang CS, Lee GG, Tokumitsu E, Ishiwara H: Impact of interface controlling layer of Al2O3for improving the retention behaviors of InGaZn oxide-based ferroelectric memory transistor. Appl Phys Lett 2010, 96: 232903. 10.1063/1.3452339
Horenstein MN, Sumner R, Miller P, Bifano T, Stewart J, Cornelissen S: Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems. In Proceedings of SPIE 7930,7930M1: January 24 2011. Edited by: . SPIE, San Francisco. Bellingham; 2011.
Brewer JE, Zhirnov VV, Hutchby JA: Memory technology for post CMOS era. IEEE Circuits Devices Mag. 2005, 21: 13–20. 10.1109/MCD.2005.1414313
Kubel F, Schmid H: Structure of a ferroelectric and ferroelastic monodomain crystal of the perovskite BiFeO3. Acta Crystallogr., Sect. B: Struct. Sci 1990, 46: 698–702. 10.1107/S0108768190006887
Kang SJ, Bae I, Shin YJ, Park YJ, Huh J, Park SM, Kim HC, Park C: Nonvolatile Polymer memory with nanoconfinement of ferroelectric crystals. Nano Lett. 2011, 11: 138–144. 10.1021/nl103094e
Pradhan MR, Rajan E: A system engineering approach to molecular electronics. International Journal of Computer Applications IJCA 2010, 3: 14–23.
Lei B, Li C, Zhang D, Zhou Q, Shung K, Zhou C: Nanowire transistors with ferroelectric gate dielectrics: enhanced performance and memory effects. Appl Phys Lett 2004, 84: 4553–4555. 10.1063/1.1759069
Shen Z, Chen Z, Li H, Qu X, Chen Y, Liu R: Nanoembossing and piezoelectricity of ferroelectric Pb (Zr0. 3,Ti0. 7)O3nanowire arrays. Appl. Surf. Sci. 2011, 257: 8820–8823. 10.1016/j.apsusc.2011.04.063
Chiang YD, Chang WY, Ho CY, Chen CY, Ho CH, Lin SJ, Wu TB, He JH: Single-ZnO-nanowire memory. IEEE Trans Electron Devices 2011, 58: 1735–1740.
Yang Y, Zhang X, Gao M, Zeng F, Zhou W, Xie S, Pan F: Nonvolatile resistive switching in single crystalline ZnO nanowires. Nanoscale 2011, 3: 1917–1921. 10.1039/c1nr10096c
Chen SW, Lee CC, Chen MT, Wu JM: Synthesis of BiFeO3/ZnO core–shell hetero-structures using ZnO nanorod positive templates. Nanotechnology 2011, 22: 115605. 10.1088/0957-4484/22/11/115605
Kim HJ, Jung SM, Kim YH, Kim BJ, Ha S, Kim YS, Yoon TS, Lee HH: Characterization of gold nanoparticle pentacene memory device with polymer dielectric layer. Thin Solid Films 2011, 519: 6140–6143. 10.1016/j.tsf.2011.03.112
Wang S, Yang H, Xian T, Liu X: Size-controlled synthesis and photocatalytic properties of YMnO3nanoparticles. Catal Commun 2010, 12: 625–628.
Mokhnatyuk A: Three-dimensional optical memory in ferroelectric media. J. Russ. Laser Res. 1999, 20: 279–295. 10.1007/BF02508545
Lowrey TA, Duesman KG, Cloud EH: Method of making a 3-dimensional programmable antifuse for integrated circuits. Patent US5324681 June 28 1994 June 28 1994
Ou E, Wong SS: Array architecture for a nonvolatile 3-dimensional cross-point resistance-change memory. IEEE J Solid State Circuits 2011, 46: 2158–2170.
Fu W, Qin S, Liu L, Kim TH, Hellstrom S, Wang W, Liang W, Bai X, Li AP, Wang E: Ferroelectric gated electrical transport in CdS nanotetrapods. Nano Lett. 2011, 11: 1913–1918. 10.1021/nl104398v
Fuhrer M, Kim B, Dürkop T, Brintlinger T: High-mobility nanotube transistor memory. Nano Lett. 2002, 2: 755–759. 10.1021/nl025577o
Ishiwara H: Current status of ferroelectric-gate Si transistors and challenge to ferroelectric-gate CNT transistors. Curr Appl Phys 2009, 9: S2-S6. 10.1016/j.cap.2008.02.013
Fu W, Xu Z, Bai X, Gu C, Wang E: Intrinsic memory function of carbon nanotube-based ferroelectric field-effect transistor. Nano Lett. 2009, 9: 921–925. 10.1021/nl801656w
Fu W, Xu Z, Liu L, Bai X, Wang E: Two-bit ferroelectric field-effect transistor memories assembled on individual nanotubes. Nanotechnology 2009, 20: 475305. 10.1088/0957-4484/20/47/475305
Rinkio M, Johansson A, Paraoanu G, Torma P: High-speed memory from carbon nanotube field-effect transistors with high-κ gate dielectric. Nano Lett. 2009, 9: 643–647. 10.1021/nl8029916
Meunier V, Kalinin SV, Sumpter BG: Nonvolatile memory elements based on the intercalation of organic molecules inside carbon nanotubes. Phys Rev Lett 2007, 98: 56401.
Naber RCG, Tanase C, Blom PWM, Gelinck GH, Marsman AW, Touwslager FJ, Setayesh S, De Leeuw DM: High-performance solution-processed polymer ferroelectric field-effect transistors. Nat Mater 2005, 4: 243–248. 10.1038/nmat1329
Zheng Y, Ni GX, Toh CT, Zeng MG, Chen ST, Yao K, Özyilmaz B: Gate-controlled nonvolatile graphene-ferroelectric memory. Appl Phys Lett 2009, 94: 163505. 10.1063/1.3119215
Naber RCG, Asadi K, Blom PWM, De Leeuw DM, De Boer B: Organic nonvolatile memory devices based on ferroelectricity. Adv Mater 2010, 22: 933–945. 10.1002/adma.200900759
Kim TW, Gao Y, Acton O, Yip HL, Ma H, Chen H, Alex KYJ: Graphene oxide nanosheets based organic field effect transistor for nonvolatile memory applications. Appl Phys Lett 2010, 97: 023310. 10.1063/1.3464292
Hong X, Hoffman J, Posadas A, Zou K, Ahn C, Zhu J: Unusual resistance hysteresis in n-layer graphene field effect transistors fabricated on ferroelectric Pb(ZrTi)O. Appl Phys Lett 2010, 97: 033114. 10.1063/1.3467450
Doh YJ, Yi GC: Nonvolatile memory devices based on few-layer graphene films. Nanotechnology 2010, 21: 105204. 10.1088/0957-4484/21/10/105204
Zheng Y, Ni GX, Bae S, Cong CX, Kahya O, Toh CT, Kim HR, Im D, Yu T, Ahn JH: Wafer-scale graphene/ferroelectric hybrid devices for low-voltage electronics. Europhys Lett 2011, 93: 17002. 10.1209/0295-5075/93/17002
Zheng Y, Ni GX, Toh CT, Tan CY, Yao K, Özyilmaz B: Graphene field-effect transistors with ferroelectric gating. Phys Rev Lett 2010, 105: 166602.
Hill NA: Why are there so few magnetic ferroelectrics? J. Phys. Chem. B 2000, 104: 6694–6709. 10.1021/jp000114x
Dawber M, Rabe K, Scott J: Physics of thin-film ferroelectric oxides. Rev Mod Phys 2005, 77: 1083. 10.1103/RevModPhys.77.1083
Pokalyakin V, Tereshin S, Varfolomeev A, Zaretsky D, Baranov A, Banerjee A, Wang Y, Ramanathan S, Bandyopadhyay S: Proposed model for bistability in nanowire nonvolatile memory. J Appl Phys 2005, 97: 124306. 10.1063/1.1937477
Yeh CS, Wu JM: Characterization of Pt/multiferroic BiFeO/(Ba, Sr)TiO/Si stacks for nonvolatile memory applications. Appl Phys Lett 2008, 93: 154101. 10.1063/1.3001800
Liao M, Imura M, Fang X, Nakajima K, Chen G, Koide Y: Integration of (PbZrTiO) on single crystal diamond as metal-ferroelectric-insulator-semiconductor capacitor. Appl Phys Lett 2009, 94: 242901. 10.1063/1.3156030
Liu X, Ji ZY, Liu M, Shang LW, Li DM, Dai YH: Advancements in organic nonvolatile memory devices. Chin Sci Bull 2011, 56: 3178–3190. 10.1007/s11434-011-4695-5
Lin CM, Shih W, Chang IY, Juan PC, Lee JY: Metal-ferroelectric (BiFeO)-insulator (YO)-semiconductor capacitors and field effect transistors for nonvolatile memory applications. Appl Phys Lett 2009, 94: 142905. 10.1063/1.3114403
Shiga H, Takashima D, Shiratake S, Hoya K, Miyakawa T, Ogiwara R, Fukuda R, Takizawa R, Hatsuda K, Matsuoka F: A 1.6 GB/s DDR2 128 Mb chain FeRAM with scalable octal bitline and sensing schemes. IEEE J Solid State Circuits 2010, 45: 142–152.
Velev JP, Duan CG, Belashchenko KD, Jaswal S, Tsymbal EY: Effect of ferroelectricity on electron transport in Pt/BaTiO3/Pt tunnel junctions. Phys Rev Lett 2007, 98: 137201.
Im JH, Jeon HS, Kim JN, Kim DW, Park BE, Kim CJ: Ferroelectric properties of SrBi2Ta2O9thin films on Si (100) with a LaZrOxbuffer layer. J. Electroceram. 2009, 22: 276–280. 10.1007/s10832-007-9366-1
Alexe M, Harnagea C, Visinoiu A, Pignolet A, Hesse D, Gsele U: Patterning and switching of nano-size ferroelectric memory cells. Scr Mater 2001, 44: 1175–1179. 10.1016/S1359-6462(01)00684-4
Rinkio M, Johansson A, Paraoanu G, Torma P: High-speed memory from carbon nanotube field-effect transistors with high-к gate dielectric. Nano Lett. 2009, 9: 643–647. 10.1021/nl8029916
Naber R, De Boer B, Blom P, De Leeuw D: Low-voltage polymer field-effect transistors for nonvolatile memories. Appl Phys Lett 2005, 87: 203509. 10.1063/1.2132062
Kim K, Lee S: Integration of lead zirconium titanate thin films for high density ferroelectric random access memory. J Appl Phys 2006, 100: 051604. 10.1063/1.2337361
Goux L, Xu Z, Kaczer B, Groeseneken G, Wouters DJ: Deposition of 60 nm thin Sr0.8Bi2.2Ta2O9layers for application in scaled 1T1C and 1T FeRAM devices. Microelectron Eng 2005, 80: 162–165.
Lee KH, Lee G, Lee K, Oh MS, Im S, Yoon SM: High-mobility nonvolatile memory thin-film transistors with a ferroelectric polymer interfacing ZnO and pentacene channels. Adv Mater 2009, 21: 4287–4291. 10.1002/adma.200900398
Lau S, Zheng R, Chan H, Choy C: Preparation and characterization of poly (vinylidene fluoride-trifluoroethylene) copolymer nanowires and nanotubes. Mater Lett 2006, 60: 2357–2361. 10.1016/j.matlet.2006.01.006
Lai EK, Lue HT, Hsieh KY: Stacked thin film transistor, non-volatile memory devices and methods for fabricating the same. Patent August 16 2011 August 16 2011
Lee W, Aw K, Wong H, Chan K, Leung M, Salim NT: An organic thin film transistor based non-volatile memory with zinc oxide nanoparticles. Thin Solid Films 2011, 519: 5208–5211. 10.1016/j.tsf.2011.01.161
Suresh A, Novak S, Wellenius P, Misra V, Muth JF: Transparent indium gallium zinc oxide transistor based floating gate memory with platinum nanoparticles in the gate dielectric. Appl Phys Lett 2009, 94: 123501. 10.1063/1.3106629
Yoon SM, Yang SH, Ko Park SH, Jung SW, Cho DH, Byun CW, Kang SY, Hwang CS, Yu BG: Effect of ZnO channel thickness on the device behaviour of nonvolatile memory thin film transistors with double-layered gate insulators of Al2O3and ferroelectric polymer. J. Phys. D: Appl. Phys. 2009, 42: 245101. 10.1088/0022-3727/42/24/245101
Kim HW, Kim NH, Shim JH, Cho NH, Lee C: Catalyst-free MOCVD growth of ZnO nanorods and their structural characterization. J Mater Sci Mater Electron 2005, 16: 13–15. 10.1007/s10854-005-4951-z
Park C, Im S, Yun J, Lee GH, Lee BH, Sung MM: Transparent photostable ZnO nonvolatile memory transistor with ferroelectric polymer and sputter-deposited oxide gate. Appl Phys Lett 2009, 95: 223506. 10.1063/1.3269576
Liao L, Li J, Liu D, Liu C, Wang D, Song W, Fu Q: Self-assembly of aligned ZnO nanoscrews: Growth, configuration, and field emission. Appl Phys Lett 2005, 86: 083106. 10.1063/1.1866504
Prakash J, Choudhary A, Kumar A, Mehta D, Biradar A: Nonvolatile memory effect based on gold nanoparticles doped ferroelectric liquid crystal. Appl Phys Lett 2008, 93: 112904. 10.1063/1.2980037
Li Q, Zhu X, Xiong HD, Koo SM, Ioannou D, Kopanski JJ, Suehle J, Richter C: Silicon nanowire on oxide/nitride/oxide for memory application. Nanotechnology 2007, 18: 235204. 10.1088/0957-4484/18/23/235204
Javey A, Guo J, Wang Q, Lundstrom M, Dai H: Ballistic carbon nanotube field-effect transistors. Nature 2003, 424: 654–657. 10.1038/nature01797
Nishio T, Miyato Y, Kobayashi K, Ishida K, Matsushige K, Yamada H: The effect of local polarized domains of ferroelectric P(VDF/TrFE) copolymer thin film on a carbon nanotube field-effect transistor. Nanotechnology 2008, 19: 035202. 10.1088/0957-4484/19/03/035202
Artukovic E, Kaempgen M, Hecht D, Roth S, Grüner G: Transparent and flexible carbon nanotube transistors. Nano Lett. 2005, 5: 757–760. 10.1021/nl050254o
Bradley K, Gabriel JCP, Grüner G: Flexible nanotube electronics. Nano Lett. 2003, 3: 1353–1355. 10.1021/nl0344864
Lee JD, Hur SH, Choi JD: Effects of floating-gate interference on NAND flash memory cell operation. IEEE Electron Device Lett. 2002, 23: 264–266.
Kim S, Nah J, Jo I, Shahrjerdi D, Colombo L, Yao Z, Tutuc E, Banerjee SK: Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3dielectric. Appl Phys Lett 2009, 94: 062107–062103. 10.1063/1.3077021
Wang X, Ouyang Y, Li X, Wang H, Guo J, Dai H: Room-temperature all-semiconducting sub-10-nm graphene nanoribbon field-effect transistors. Phys Rev Lett 2008, 100: 206803.
Liao L, Bai J, Lin YC, Qu Y, Huang Y, Duan X: High-performance top-gated graphene-nanoribbon transistors using zirconium oxide nanowires as high dielectric constant gate dielectrics. Adv Mater 2010, 22: 1941–1945. 10.1002/adma.200904415
Liao L, Bai J, Cheng R, Lin YC, Jiang S, Qu Y, Huang Y, Duan X: Sub-100 nm channel length graphene transistors. Nano Lett. 2010, 10: 3952–3956. 10.1021/nl101724k
Liao L, Bai J, Qu Y, Lin Y, Li Y, Huang Y, Duan X: High-к oxide nanoribbons as gate dielectrics for high mobility top-gated graphene transistors. PNAS 2010, 107: 6711. 10.1073/pnas.0914117107
Liao L, Duan X: Graphene-dielectric integration for graphene transistors. Mater Sci Eng R 2010, 354–370.
Meric I, Han MY, Young AF, Ozyilmaz B, Kim P, Shepard KL: Current saturation in zero-bandgap, top-gated graphene field-effect transistors. Nat Nanotechnol 2008, 3: 654–659. 10.1038/nnano.2008.268
Kato Y, Kaneko Y, Tanaka H, Kaibara K, Koyama S, Isogai K, Yamada T, Shimada Y: Overview and future challenge of ferroelectric random access memory technologies. Jpn. J. Appl. Phys. 2007, 46: 2157–2163. 10.1143/JJAP.46.2157
Gysel R, Stolichnov I, Tagantsev AK, Riester SWE, Setter N, Salvatore GA, Bouvet D, Ionescu AM: Retention in nonvolatile silicon transistors with an organic ferroelectric gate. Appl Phys Lett 2009, 94: 263507. 10.1063/1.3158959
Ren TL, Zhang MM, Jia Z, Wang LK, Wei CG, Xue KH, Zhang YJ, Hu H, Xie D, Liu LT: Model and key fabrication technologies for FeRAM. In 2009 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT): July 5–10 2009; Xi'an. Edited by: Kuo Y. ECS, Pennington; 2009:217.
Jeong Hwan K, Park BE, Ishiwara H: Fabrication and electrical characteristics of metal-ferroelectric-semiconductor field effect transistor based on poly (vinylidene fluoride). Jpn. J. Appl. Phys. 2008, 47: 8472–8475. 10.1143/JJAP.47.8472
Lou X: Polarization fatigue in ferroelectric thin films and related materials. J Appl Phys 2009, 105: 024101–024124. 10.1063/1.3056603
Dawber M, Scott J: A model for fatigue in ferroelectric perovskite thin films. Appl Phys Lett 2000, 76: 1060–1062. 10.1063/1.125938
Scott J, Dawber M: Oxygen-vacancy ordering as a fatigue mechanism in perovskite ferroelectrics. Appl Phys Lett 2000, 76: 3801. 10.1063/1.126786
Lou X, Zhang M, Redfern S, Scott J: Local phase decomposition as a cause of polarization fatigue in ferroelectric thin films. Phys Rev Lett 2006, 97: 177601.
Fe L, Wouters D: Effect of RuO2growth temperature on ferroelectric properties of RuO2/Pb (Zr, Ti) O3/RuO2/Pt capacitors. Appl Phys Lett 2000, 76: 1318–1320. 10.1063/1.126021
Jin H, Zhu J: Size effect and fatigue mechanism in ferroelectric thin films. J Appl Phys 2002, 92: 4594. 10.1063/1.1506193
Juan TP, Chang C, Lee JY: A new metal-ferroelectric (PbZr0. 53Ti0. 47O3)-insulator (Dy2O3)-semiconductor (MFIS) FET for nonvolatile memory applications. IEEE Electron Device Lett. 2006, 27: 217–220.
Luo YF, Xie D, Zang YY, Song R, Ren TL, Liu LT: Buffer layer dependence of B3.15Nd0.85Ti3O12(BNdT) based MFIS capacitor for FeFET application. In 2008 9th International Conference on Solid-State and Integrated-Circuit Technology: October 20–23 2008;Beijing. Edited by: Huang R. IEEE, Washington D.C; 2008:2592.
Yang C, Hu G, Wen Z, Yang H: Effects of Bi2Ti2O7buffer layer on memory properties of BiFe0. 95Mn0. 05O3thin film. Appl Phys Lett 2008, 93: 172906–172903. 10.1063/1.3013564
Murari N, Thomas R, Pavunny S, Calzada J, Katiyar R: DyScO3buffer layer for a performing metal-ferroelectric-insulator-semiconductor structure with multiferroic BiFeO3thin film. Appl Phys Lett 2009, 94: 142907–142903. 10.1063/1.3116088
Park C, Lee G, Lee KH, Im S, Lee BH, Sung MM: Enhancing the retention properties of ZnO memory transistor by modifying the channel/ferroelectric polymer interface. Appl Phys Lett 2009, 95: 153502. 10.1063/1.3247881
Park CH, Lee KH, Lee BH, Sung MM, Im S: Channel/ferroelectric interface modification in ZnO non-volatile memory TFT with P(VDF-TrFE) polymer. J Mater Chem 2009, 20: 2638–2643.
Son JY, Ryu S, Park YC, Lim YT, Shin YS, Shin YH, Jang HM: A nonvolatile memory device made of a ferroelectric polymer gate nanodot and a single-walled carbon nanotube. ACS Nano 2010, 4: 7315–7320. 10.1021/nn1021296
Wang Z, Hu J, Yu MF: One-dimensional ferroelectric monodomain formation in single crystalline BaTiO nanowire. Appl Phys Lett 2006, 89: 263119. 10.1063/1.2425047
Zhang X, Zhao X, Lai C, Wang J, Tang X, Dai JY: Synthesis and piezoresponse of highly ordered Pb(Zr0. 53Ti0. 47)O3 nanowire arrays. Appl Phys Lett 2004, 85: 4190–4192. 10.1063/1.1814427
Wang J, Sandu C, Colla E, Wang Y, Ma W, Gysel R, Trodahl H, Setter N, Kuball M: Ferroelectric domains and piezoelectricity in monocrystalline Pb(Zr, Ti)O nanowires. Appl Phys Lett 2007, 90: 133107. 10.1063/1.2716842
Alexe M, Hesse D, Schmidt V, Alexe M, Hesse D, Schmidt V, Hesse D, Fan H, Zacharias M, Gsele U: Ferroelectric nanotubes fabricated using nanowires as positive templates. Appl Phys Lett 2006, 89: 120–123.
Feng M, Wang W, Zhou Y, Jia D: Synthesis and characterization of ferroelectric SrBi2Ta2O9nanotubes arrays. J. Sol–gel Sci. Technol 2009, 52: 120–123. 10.1007/s10971-009-1995-1
Seo B, Shaislamov U, Kim SW, Kim HK, Yang B, Hong S: Bi3. 25La0. 75Ti3O12(BLT) nanotube capacitors for semiconductor memories. Physica E 2007, 37: 274–278. 10.1016/j.physe.2006.09.003
Takashima D: Overview and scaling prospect of ferroelectric memories. CMOS Processors and Memories 2010, 36–380.
Choi WB, Bae E, Kang D, Chae S, Cheong B, Ko J, Lee E, Park W: Aligned carbon nanotubes for nanoelectronics. Nanotechnology 2004, 15: S512. 10.1088/0957-4484/15/10/003
Sun Y, Fuge GM, Ashfold MNR: Growth mechanisms for ZnO nanorods formed by pulsed laser deposition. Superlattices Microstruct. 2006, 39: 33–40. 10.1016/j.spmi.2005.08.029
Acknowledgments
This work was supported by the MOE NCET-10-0643 and NSFC grant (nos. 11104207 and 10975109) as well as ‘the grant of state key laboratory of advanced technology for materials synthesis and processing (Wuhan University of Technology)’.
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XL wrote and revised the manuscript. YL and WC suggested many helpful and interesting issues for improving the review paper. JL revised the paper thoroughly. LL drafted and revised the manuscript. All authors read and approved the final manuscript.
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Liu, X., Liu, Y., Chen, W. et al. Ferroelectric memory based on nanostructures. Nanoscale Res Lett 7, 285 (2012). https://doi.org/10.1186/1556-276X-7-285
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DOI: https://doi.org/10.1186/1556-276X-7-285